Inertial sensors

Inertial sensors can be used alone, or be combined into inertial measurement units (IMUs) for motion tracking.

Accelerometers manufactured for vibration measurements on AC motors in a wireless sensor network. The silicon accelerometer is glass-encapsulated using wafer scale adhesive bonding. Cavities in the glass allow the moving mass to vibrate freely. The accelerometer was designed and fabricated at MiNaLab.

SINTEF has experience with feasibility studies, design, processing and characterization of accelerometers and gyroscopes for a variety of applications and environments. FEM simulations of mechanical, thermal, electrostatic, and other properties ensure that the component is optimised with respect to its application.

Some of the designed devices are manufactured at MiNaLab. However, SINTEF also provides pure design services, and we have designed components for production in the foundries of Tronics (MEMSOI MPW), Infineon Technologies SensorNor (MultiMEMS), and the polymer process of ThinXXS. The use of foundries enables swift transfer to large-scale production if desired.

Contact person: Geir Uri Jensen