Micro Optics
We know micro optical system today in for instance CD- and DVD-systems. High precision, high volume components are produced at low cost. Also the replication techniques enables low cost component for specialized applications. Micromechanical components made from Si-wafers have made possible the immense growth of the telecom capacity needed for the Internet.
The development in microtechnology has resulted in efficient novel production processes for the fabrication of microstructures and microsystems characterised by low cost at high volumes. Microtechnology provides new means also for making novel optical elements. The main technology drive has been telecom applications (e.g. optical switches), but now biological analysis systems are increasing in importance. For SINTEF part the focus has been on development of sensors.
In optics the possibility to produce high precision layered structures and integrated detectors opens new markets and application areas. Wafer level integration of for instance microlenses, light sources, spectral selective elements and dedicated detectors opens for efficient system production. These features open for the possibility to miniaturise existing sensors, or to make completely new sensors. Also, it is now possible to generate high-resolution surface topographies that enable the production of advanced diffractive optical elements for beam shaping or dispersion.
Application examples:
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Illustration of the principles behind 2 different optical microphones developed at SINTEF. a) is based on a Fabry-Perot resonator with a built-in photodetecting pn-junction, and b) is based on modulating the efficiency of a diffractive lens. |