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Environmental monitoring

Increasing awareness and new regulations for safety and emission control have created a strong demand for low-cost, reliable gas sensors.

The Microsystems and nanotechnology department has been involved in the development of infra-red (IR) gas sensors based on silicon microsystems technology. This includes realization of key components such as IR sources, tunable filters and silicon based IR detectors. A miniature photoacoustic gas sensor is currently under development within the EU - supported prosjekt NETGAS.

Gas sensor for indoor air quality control 
SINTEF is an active partner in several technology platforms for MEMS-based gas sensors, and CO2 sensors in particular. The MONTIE project web-page and final report provides an overview of current state-of-the-art in Air Quality / Environment Gas Sensors (MEMS-based). The workshops (activities) and presentations held during the MONTIE project give an overview and introduction to the application field and motivation for several on-going research projects. How to navigate in the web-page is best described in the report, which may be downloaded free of charge from the Nordic Innovation web-site.

Infra-red light source
- Blackbody IR radiation from a heated silicon resistor
- High modulation speed due to low thermal mass

The infra-red light source has been implemented in gas sensors from SIMRAD Optronics for more than 10 years. The earliest sensors are still in operation. 

      Glowing infra-red light source

Applications
-IR gas sensing
-Photo acoustic gas sensor

Contact person: Ib-Rune Johansen

 

 

Published January 9, 2008

The sensitive pressure sensor seen from above. The diaphragm is 2µm thick at the thinnest torus. The sensor measures pressures in a range from 1mPa to 1 Bar.

Three pressure sensing elements designed at SINTEF and produced in the NORMIC MPW process. The gas to be detected in the photoacoustic gas sensor is captured between the glass and the silicon in a sealed cavity. The captured gas is exposed to modulated light and the oscillating pressure is measured.


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